Clean Room Crane
Clean Room Crane
제품규격
| Fed.Std.209E (ATRBORNE PARTICULATE CLEANLINESS CLASSES) | |||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| CLASS NAME | CLASS LIMITS | ||||||||||
| 0.1㎛ | 0.2㎛ | 0.3㎛ | 0.5㎛ | 5㎛ | |||||||
| Vo1.units | Vo1.units | Vo1.units | Vo1.units | Vo1.units | |||||||
| SI | English | (㎥) | (ft3) | (㎥) | (ft3) | (㎥) | (ft3) | (㎥) | (ft3) | (㎥) | (ft3) |
| M1 | 350 | 9.91 | 75.7 | 2.14 | 30.9 | 0.875 | 10.0 | 0.283 | - | - | |
| M1.5 | 1 | 1240 | 35.0 | 265 | 7.50 | 106 | 3.00 | 35.3 | 1.00 | - | - |
| M2 | 3500 | 99.1 | 757 | 21.4 | 309 | 8.75 | 100 | 2.83 | - | - | |
| M2.5 | 10 | 12400 | 350 | 265 | 75.0 | 1060 | 30.0 | 353 | 10.0 | - | - |
| M3 | 35000 | 991 | 7570 | 214 | 3090 | 87.5 | 1000 | 28.3 | - | - | |
| M3.5 | 100 | - | - | 26500 | 750 | 10600 | 300 | 3530 | 100 | - | - |
| M4 | - | - | 75700 | 2140 | 30900 | 875 | 1000 | 283 | - | - | |
| M4.5 | 1000 | - | - | - | - | - | - | 35300 | 1000 | 247 | 700 |
| M5 | - | - | - | - | - | - | 100000 | 2830 | 618 | 17.5 | |
| M5.5 | 10000 | - | - | 353000 | 10000 | ||||||
| M6 | - | - | - | - | - | - | 1000000 | 28300 | 6180 | 175 | |
| M6.5 | - | - | - | - | - | - | 3530000 | 100000 | 24700 | 700 | |
| M7 | - | - | - | - | - | - | 10000000 | 283000 | 61800 | 1750 | |
| 산업 | 청정도 등급 CLEANLINESS LEVEL(CLASS) | ||||
|---|---|---|---|---|---|
| 10 | 100 | 1,000 | 10,000 | 100,000 | |
| 반 도 체 공 업 |
결정제조 SILICON CRYSTALIZATION | ||||
| 웨이퍼제조 WAFER MANUFACTURE | |||||
| 확산 DIFFUSION | |||||
| 웨이퍼처리 WAFER PROCESSING | |||||
| 포토리소그래피 PHOTOLITHOGRPHY | |||||
| 칩제조 IC CHIP MANUFACTURE | |||||
| 조립 ASSEMBLING | |||||
| 검사 INSPECTION | |||||
DRAWING
